光学精密工程2013，Vol.21Issue(3)：664-671,8.DOI:10.3788/OPE.20132103.0664
零阿贝误差的纳米三坐标测量机工作台及误差分析
Nano-CMM stage with zero Abbe error and its error analysis
摘要
Abstract
A new type nanometer Coordinate Measuring Machine(CMM) stage which meets the Abbe principle in three-dimensional directions is proposed to avoid the Abbe error in conventional CMMs and reduce the guide motion error that influences on the nano-CMM measurement uncertainty. The stage can move in three dimensional directions and its x guide and y guide are in a coplanar structure. The three measuring lines of the stage are orthogonal and intersect at one point which coincides with the center of a probe. Moreover, the measuring lines of x measurement system and y measurement system are coplanar with the plane of the xy stage. According to the characteristics of this stage, the impacts of various errors on the stage are analyzed, the main source errors to the measurement uncertainty are given and new correction methods for those errors are proposed. Finally, two pieces of first gauge block are measured on the developed stage. Measurement results show that the standard deviation of flatness error of first gauge block working surface is 11 nm, and that of step height is about 21 nm and the difference between the average of step heights and the calibrated value is about 1 nm. The theoretical analysis and experiment show that the nano-CMM avoids the impact of various error sources, especially the impact of Abbe error, and can be used in high-precision three-dimensional measurement.关键词
三维纳米工作台/纳米三坐标测量机/阿贝误差/误差修正Key words
three-dimensional nano-stage/nano Coordinate Measuring Machine (nano-CMM) /Abbe error/error correction分类
机械制造引用本文复制引用
黄强先,余夫领,宫二敏,王晨晨,费业泰..零阿贝误差的纳米三坐标测量机工作台及误差分析[J].光学精密工程,2013,21(3):664-671,8.基金项目
国家863高技术研究发展计划重点项目(No.2008AA042409) （No.2008AA042409）
