光学精密工程2013，Vol.21Issue(3)：709-716,8.DOI:10.3788/OPE.20132103.0709
应变式微型精密压电驱动器的一体化设计及其PID控制
Design and control of miniature piezoelectric actuator based on strain gauge sensor
摘要
Abstract
A kind of miniature precise piezoelectric actuator with strain gauges is designed. The actuator uses a displacement-amplified mechanism to amplify the small strain and measure the output change of the wheat-stone bridge composed of strain gauges to obtain the displacement output indirectly. The experiments show that the accuracy of the actuator is 80 nm. Due to the complex hysteresis characteristics, it is very difficult to control this actuator. However, PID control algorithm is suitable for control of this actuator effectively in the closed loop. A position test and a tracking test at the quasi-static condition are performed to verify the performance of the actuator. Experimental results show that the control performance of the PID control algorithm is good for this actuator. It has effective po- sitioning performance, the positioning error does not exceed 0. 059 μm; the maximum tracking errors for single-frequency signal and multi-frequency signal do not exceed 0. 085 μm and 0. 092 μm, respectively. These results prove the validity of the control algorithm in the quasi-static condition.关键词
压电陶瓷/压电驱动器/迟滞/应变反馈/PID控制/定位精度Key words
piezoelectric ceramic/piezoelectric actuator/hysteresis/strain feedback/PID control/positioning precision分类
信息技术与安全科学引用本文复制引用
王耿,官春林,张小军,周虹,饶长辉..应变式微型精密压电驱动器的一体化设计及其PID控制[J].光学精密工程,2013,21(3):709-716,8.基金项目
"西部之光"计划资助项目(No.A11K005) （No.A11K005）
