半导体学报（英文版）2013，Vol.34Issue(3)：51-57,7.DOI:10.1088/1674-4926/34/3/034007
The design and test of MEMS piezoresistive ultrasonic sensor arrays
The design and test of MEMS piezoresistive ultrasonic sensor arrays
摘要
关键词
ultrasonic sensor/ piezoresistive/ integrated array/ multi-target identificationKey words
ultrasonic sensor/ piezoresistive/ integrated array/ multi-target identification引用本文复制引用
Lian Deqin,He Changde,Zhang Hui,Yu Jiaqi,Yuan Kejing,Xue Chenyang..The design and test of MEMS piezoresistive ultrasonic sensor arrays[J].半导体学报（英文版）,2013,34(3):51-57,7.基金项目
Project supported by the National High Technology Research and Development Program of China (No.2011AA040404) and the Special Fund of the National Natural Science Foundation of China (No.61127008) （No.2011AA040404）
