电子学报2013,Vol.41Issue(5):1016-1018,3.DOI:10.3969/j.issn.0372-2112.2013.05.030
一种新的ESD防护器件的多脉冲TLP仿真方法
A Novel Multi-Pulse TLP Simulation for ESD Protection Device
摘要
Abstract
A novel TLP simulation method for ESD protection device in integrated circuit is proposed,which is similar with the real TLP process.By imposing series of current pulses on the device structure,the corresponding voltage vs.time curves are obtained.The average current value inthe range of 70% ~ 90% time for each I-t curve is calculated,and so is the average voltage value,and hence the simulated I-V curve can be obtained,from which not only the trigger voltage and the holding voltage,but also the second breakdown current can be evaluated.The simulation results for LSCR fit well with the test one,from which the validity of this method can be verified.关键词
静电放电/仿真/多脉冲Key words
ESD(ElectroStatic Discharge) / simulation/ multi-pulse分类
信息技术与安全科学引用本文复制引用
丁扣宝,黄大海..一种新的ESD防护器件的多脉冲TLP仿真方法[J].电子学报,2013,41(5):1016-1018,3.基金项目
国家自然科学基金(No.61274035) (No.61274035)