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一种新的ESD防护器件的多脉冲TLP仿真方法

丁扣宝 黄大海

电子学报2013,Vol.41Issue(5):1016-1018,3.
电子学报2013,Vol.41Issue(5):1016-1018,3.DOI:10.3969/j.issn.0372-2112.2013.05.030

一种新的ESD防护器件的多脉冲TLP仿真方法

A Novel Multi-Pulse TLP Simulation for ESD Protection Device

丁扣宝 1黄大海1

作者信息

  • 1. 浙江学微电子与光电子研究所,浙江杭州310027
  • 折叠

摘要

Abstract

A novel TLP simulation method for ESD protection device in integrated circuit is proposed,which is similar with the real TLP process.By imposing series of current pulses on the device structure,the corresponding voltage vs.time curves are obtained.The average current value inthe range of 70% ~ 90% time for each I-t curve is calculated,and so is the average voltage value,and hence the simulated I-V curve can be obtained,from which not only the trigger voltage and the holding voltage,but also the second breakdown current can be evaluated.The simulation results for LSCR fit well with the test one,from which the validity of this method can be verified.

关键词

静电放电/仿真/多脉冲

Key words

ESD(ElectroStatic Discharge) / simulation/ multi-pulse

分类

信息技术与安全科学

引用本文复制引用

丁扣宝,黄大海..一种新的ESD防护器件的多脉冲TLP仿真方法[J].电子学报,2013,41(5):1016-1018,3.

基金项目

国家自然科学基金(No.61274035) (No.61274035)

电子学报

OA北大核心CSCDCSTPCD

0372-2112

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