地震地磁观测与研究2013，Vol.34Issue(1)：205-211,7.DOI:10.3969/j.issn.1003-3246.2013.01/02.039
应用于MEMS加速度计的小型恒温系统的实现
The design and implementation of mini thermal-stable system applying to MEMS accelerator
摘要
Abstract
Temperature fluctuation is the major reason to influence the stability and performance of instruments. This paper presents a method for the implementation of mini thermal-stable system, which can keep the temperature surrounding MEMS accelerator constant. And then, some relative parameters of MEMS accelerator can be improved. This system is easy to get, with special technology, and can change the thermal-stabe working point to reduce power consumption. The result of experiment shows that, the zero-level drift of MEMS accelerator with thermal-stable system decreases obviously.关键词
恒温系统/MEMS加速度计/零点漂移/低功耗Key words
thermal-stable system/ MEMS accelerometer zero-level/ drift low power consumption引用本文复制引用
李建飞,薛兵,张俊峰,朱小毅,王晓蕾..应用于MEMS加速度计的小型恒温系统的实现[J].地震地磁观测与研究,2013,34(1):205-211,7.基金项目
中国地震局地震预测研究所基本科研业务费专项(编号:2010IES0201)资助 （编号:2010IES0201）
