硅酸盐学报2013，Vol.41Issue(6)：820-824,5.DOI:10.7521/j.issn.0454-5648.2013.06.17
退火处理对玻璃表面沉积的ZnO薄膜微观形貌与性能的影响
Effect of Annealing on Microstructure and Properties of ZnO Thin Films Deposited on Glass Surface
阮鑫栋 1姜妍彦 1杜兴科 1刘贵山 1胡志强 1刘敬肖1
作者信息
- 1. 大连工业大学纺织与材料工程学院,辽宁大连 116034
- 折叠
摘要
Abstract
ZnO thin films were prepared by a ultrasonic spray pyrolysis (USP) method on soda-lime-silica float glass substrate at the deposition temperature of 500 ℃ with zinc nitrate as a precursor.The ZnO thin films were annealed at different temperatures (500,550,600 ℃) and durations (30,60,120 min),respectively.Influence of annealing condition on the microstructure,morphology and optical properties of the films was investigated.The results indicate that the annealing treatment improves the quality of the ZnO film and increases the c-axis orientation.The adhesion strength of the ZnO film increases with the extension of the annealing duration,however,the c-axis orientation degree first increases and then decreases at 120 min.The c-axis orientation and the visible light transmittance firstly increase and then decrease with the increase of annealing temperature.The film obtained at the optimum annealing temperature of 500 ℃ and the duration of 60 min has a good crystallization quality,uniform crystal size and dense smooth surface,giving the improved optical properties.The visible light transmittance increases from 70％ to 90％ after annealing treatment.关键词
氧化锌薄膜/超声喷雾法/退火处理/微观形貌Key words
zinc oxide thin film/ ultrasonic spray pyrolysis/ annealing treatment/ microstructure分类
化学化工引用本文复制引用
阮鑫栋,姜妍彦,杜兴科,刘贵山,胡志强,刘敬肖..退火处理对玻璃表面沉积的ZnO薄膜微观形貌与性能的影响[J].硅酸盐学报,2013,41(6):820-824,5.
