光学精密工程2013，Vol.21Issue(6)：1380-1386,7.DOI:10.3788/OPE.20132106.1380
极紫外Mg/SiC、Mg/Co多层膜的稳定性
Stability of Mg/SiC, Mg/Co EUV multilayers
摘要
Abstract
To research the stability of Mg-based multilayers,two groups of multilayers,[Mg/Co]20 and [Mg/SiC]20 were coated on a Si(100) substrate by magnetron sputtering method.The two samples were tested by a microscopy,a surface roughness experiment and an X-ray grazing incidence reflectivity test at room temperature and a relative humidity of 80％.The contract experiments on multilayer damage for Mg/Co 和 Mg/SiC were performed in the same condition.The results show that after being exposed in the atmospheric environment for 4 days,the damaged area and surface roughness of the Mg/SiC multilayer sample are up to 26.34％ and 10 nm,respectively,while those of the Mg/Co multilayer sample are 2.78％ and 5 nm,respectively.After 6 days,the 1st reflection peak of Mg/SiC sample is completely disappeared,and Mg/Co sample still has a peak of 47.63％ reflectivity.The experimental results show that the Mg/Co multilayer sample has a better environmental stability as compared with the Mg/SiC multilayer.The X Photoelectron Spectroscopy (XPS) shows that the productions of the damaged Mg-based multilayers are mainly MgCO3,Mg(OH)2 and modest MgO.Moreover,the content ratio of Mg (OH)2 and MgCO3 in the inner layer is significantly higher than that in the surface layer.Experimental results suggest that the reason for Mg-based multilayer damage is the erosion of H2 O(g),so the capping layer of Mg-based multilayer should prevent the H2 O(g) penetrating into the mulilayer.关键词
极紫外多层膜/多层膜反射镜/稳定性/湿度Key words
Extreme Ultraviolet(EUV) multilayer/multilayer mirror/stability/humidity分类
数理科学引用本文复制引用
朱京涛,宋竹青,丁涛,马爽,李浩川..极紫外Mg/SiC、Mg/Co多层膜的稳定性[J].光学精密工程,2013,21(6):1380-1386,7.基金项目
国家自然科学基金资助项目(No.10905042,11061130549) （No.10905042,11061130549）
国家973重点基础研究发展计划资助项目(No.2011CB922203) （No.2011CB922203）
