人工晶体学报2013，Vol.42Issue(6)：1104-1108,5.
QF1基底上可见光区宽带增透膜研究
Study on Wideband Anti-reflection Coatings of QF1 Substrate in the Visible Light Spectrum
朱华新 1刘桂林 2高劲松 3王彤彤 3李帅 1严慧敏 1郭颖 1李果华1
作者信息
- 1. 江南大学理学院,无锡214122
- 2. 江南大学物联网工程学院,无锡214122
- 3. 中国科学院长春光学精密机械与物理研究所,中国科学院光学系统先进制造技术重点实验室,长春130033
- 折叠
摘要
Abstract
A typle of wideband anti-reflection coatings were designed on QF1 substrate on the visible light spectrum (from 0.4 μm to 0.8 μm).The coatings were fabricated by electron beam physical vapor deposition (EBPVD).Two types of coating materials titanium oxide (TiO2) and silicon oxide (SiO2)which was treated as high index and low index material respectively were used in this process.Edinburgh spectrometer was used to measure the transmittance of the the sample which was coated the anti-reflection coatings on both side.The test result indicates that its average transmittance was about 98.43％.The thickness of deposited layers was thicker than designed one,which verified by SEM cross section.Hence,there was a little of red-shift with the curve of spectrum.It has the wideband anti-reflection character.And it almost accords with the designing result.Measurement of stability and firmness indicates the coatings had good performance.It makes it possible to be used in some rigorous environment.关键词
光学薄膜/电子束蒸发物理气相沉积/透过率Key words
optical thin film/ electron beam physical vapor deposition/ transmittance分类
数理科学引用本文复制引用
朱华新,刘桂林,高劲松,王彤彤,李帅,严慧敏,郭颖,李果华..QF1基底上可见光区宽带增透膜研究[J].人工晶体学报,2013,42(6):1104-1108,5.
