中国电机工程学报2013，Vol.33Issue(9)：79-87,前插11,10.
高性能永磁同步平面电机及其关键技术发展综述
Development of the High-performance Synchronous Permanent Magnet Planar Motor and Its Key Technologies
摘要
Abstract
The synchronous permanent magnet planar motors (SPMPM) have many advantages such as direct driving,high force density,low heat consumption,high accuracy,and has broad application prospects in modem precision,ultra precision machining equipments,especially in the extreme-UV lithography equipment.According to the structures of magnet and coil array,the SPMPM have been divided into four categories,e.g.combined planar motors,semi-combined planar motors,winding stacked planar motors and symmetric planar motors.Characteristics of each category were described.The development of the key technology of SPMPM was summarized.In accordance with the current problems,some possible development trends of the SPMPM are discussed at the last.关键词
永磁同步平面电机/光刻机/二维平面定位装置/发展趋势Key words
synchronous permanent magnet planar motor (SPMPM)/ lithography equipment/ two-dimensional planar positioning device/ development trends分类
信息技术与安全科学引用本文复制引用
寇宝泉,张鲁,邢丰,李立毅,张赫..高性能永磁同步平面电机及其关键技术发展综述[J].中国电机工程学报,2013,33(9):79-87,前插11,10.基金项目
国家科技重大专项(2009ZX02207-001) （2009ZX02207-001）
新世纪优秀人才支持计划资助(NCET-08-0158) （NCET-08-0158）
National Science and Technology Major Project (2009ZX02207-001) （2009ZX02207-001）
Project Supported by Program for New Century Excellent Talents in University (NCET-08-0158). （NCET-08-0158）
