传感技术学报2013，Vol.26Issue(4)：467-470,4.DOI:10.3969/j.issn.1004-1699.2013.04.006
一种新型的电离式MEMS气体传感器
A Novel Ionization MEMS Gas Sensor
摘要
Abstract
A novel ionization gas sensor,linear resistivity ionization MEMS gas senor,is presented.This MEMS gas sensor differs from the traditional ionization gas sensor,and does not use the breakdown current to fingerprint gas components,but the conductivity of different gases.This can effectively avoid to damage the electrode structures due to the high applied voltage.This gas sensor has good repeatability and stability.In the low-voltage condition,this gas sensor presented different volt-ampere characteristic curves and conductivities of different gas components,so the gas sensing characteristic of this device was proved.The linear characteristic of this gas sensor is also presented.关键词
微机电系统/一维纳电极阵/电离式气体传感器/气体电导率Key words
MEMS/one-dimensional nano electrode array/ionization gas sensor/gas conductivity分类
信息技术与安全科学引用本文复制引用
詹昌华,潘元志,赵小林,侯中宇..一种新型的电离式MEMS气体传感器[J].传感技术学报,2013,26(4):467-470,4.基金项目
国家自然科学基金项目(61274118/F040703,60906053/F040703) （61274118/F040703,60906053/F040703）
