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用光电隔离法提高小电容测量灵敏度问题的研究

王维 何小兵 戴冬雪 黄璐 杨雁

电测与仪表2012,Vol.49Issue(z1):10-13,4.
电测与仪表2012,Vol.49Issue(z1):10-13,4.

用光电隔离法提高小电容测量灵敏度问题的研究

Improve Small Capacitance Measurement Sensitivity by Opto-electronic Isolation Method

王维 1何小兵 1戴冬雪 1黄璐 1杨雁1

作者信息

  • 1. 中国计量科学研究院电学与磁学所,北京100013
  • 折叠

摘要

Abstract

The cross capacitor of NIM established in 1970s is the primary standard of Chinese capacitance traceability system.It has a relative uncertainty of 1 in 107.The value of the capacitor is about 0.5 pF.This small value leads to a low SNR,and the sensitivity of the measurement is about several parts in 108.An opto-electronic isolating method is designed in this paper,cooperated with a lock-in amplifier,which can improve the capacitance measurement sensitivity to 1 in 108.

关键词

计算电容/信噪比/灵敏度

Key words

cross capacitor/SNR/sensitivity

分类

信息技术与安全科学

引用本文复制引用

王维,何小兵,戴冬雪,黄璐,杨雁..用光电隔离法提高小电容测量灵敏度问题的研究[J].电测与仪表,2012,49(z1):10-13,4.

电测与仪表

OA北大核心CSTPCD

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