材料科学与工程学报2013，Vol.31Issue(4)：621-626,6.
陶瓷微器件的软刻蚀成形研究进展
Research Progress in Soft Molding of Ceramic Microcomponents
摘要
Abstract
Soft lithography,developed from conventionalphotolithographic techniques,is a new microfabrication process that uses a flexible elastomer as a stamp or mold for replicating micro-and nanoscale structures.This technique offers a new net-shaping technique for the fabrication of ceramic microcomponents due to its high resolution,low cost,flexibility,and easy implementation.In particular,the fabrication process consists of elastomeric mold replication,preceramic or suspension preparation,molding,demolding and sintering.The latest progresses in the ceramic microfabrication by soft lithography are comprehensive reviewed.The key factors for successful fabrication of ceramic microcomponents are discussed.Directions for the future research are suggested.关键词
软刻蚀/陶瓷微器件/弹性模Key words
soft lithography/ceramic microcomponents/elastomeric mold分类
化学化工引用本文复制引用
苏博,吴有智,孟军虎,吕晋军..陶瓷微器件的软刻蚀成形研究进展[J].材料科学与工程学报,2013,31(4):621-626,6.基金项目
中国科学院"百人计划"资助项目 （）
