东南大学学报（自然科学版）2013，Vol.43Issue(4)：777-781,5.DOI:10.3969/j.issn.1001-0505.2013.04.019
亚微米电解加工的试验研究
Experimental study on submicron electrochemical machining
摘要
Abstract
In order to improve the stability of Ag nanowires in submicron electrochemical machining,Au is sputtered on the surface of Ag nanowires.The results of stability experiments of Ag nanowires show that the stability of Ag nanowires increases with the increase of the thickness of sputtering layer.However,when the sputtering layer is too thick,Ag nanowires are bent.When the thickness of the sputtering layer is about 55 nm,the submicron tool electrode dissolves in electrochemical machining due to loose sputtering layer,while it is bent because of large internal stress when the thickness of the sputtering layer is about 310 nm.Therefore,the submicron tool electrode with the thickness of the sputtering layer of about 150 nm is appropriate to submicron electrochemical machining.In the electrolyte with 0.1 mol/L H2SO4,by using the pulse generator with 50 ns in period,6 ns in pulse on-time and 4 V in voltage,a submicron groove with the length of 30 μm,depth of 80 nm,minimum bottom width of 450 nm and maximum entrance width of 1 μm is prepared suecessfully in the surface of high-temperature-alloys workpiece.关键词
微纳电解加工/亚微米电解加工/Ag纳米线/工具电极Key words
micro-nano electrochemical machining/submicron electrochemical machining/Ag nanowire/tool electrode分类
矿业与冶金引用本文复制引用
吴修娟,曲宁松,曾永彬,王玉峰,朱荻..亚微米电解加工的试验研究[J].东南大学学报（自然科学版）,2013,43(4):777-781,5.基金项目
国家自然科学基金资助项目(91023018). （91023018）
