发光学报2013，Vol.34Issue(7)：935-939,5.DOI:10.3788/fgxb20133407.0935
亚波长金属光栅结构的制备与矢量衍射理论分析
Fabrication of Subwavelength Metal Grating and Analysis with Vector Diffraction Theory
摘要
Abstract
We fabricated a subwavelength metallic grating using nanoimprint technology and measured the reflection spectrum using ultraviolet-visible-near-infrared spectrophotometer.Based on the theory of conventional rigorous coupled wave analysis,we used a new method to analyze the diffraction problems of subwavelength metallic gratings.We used fast Fourier factorization (FFF) method to derive the coupled wave equations,then each space harmonic can be expanded in terms of Legendre polynomials in grating region.Using this modified vector diffraction theory,we calculated the diffraction efficiency and the field distribution.All calculated results show great agreement with the experimental results.关键词
亚波长金属光栅/纳米压印/表面等离子体Key words
subwavelength metallic gratings/ nanoimprint/ surface plasmon分类
数理科学引用本文复制引用
郑改革,詹煜,曹焜,徐林华..亚波长金属光栅结构的制备与矢量衍射理论分析[J].发光学报,2013,34(7):935-939,5.基金项目
国家自然科学基金青年基金(61203211) （61203211）
南京信息工程大学青年教师科学技术研究与发展计划(20110423)资助项目 （20110423）
