硅酸盐通报2013，Vol.32Issue(7)：1394-1396,3.
采用石墨电极制备多孔硅工艺研究
Study on Porous Silicon Prepared by Using Graphite Electrode
摘要
Abstract
By using graphite electrode as cathode and adding some nitric acid (HNO3,65％) into corrosion solution mixed by 40％ hydrofluoric acid (HF) and 99.7％ ethanol absolute (C2HsOH),porous silicon can be prepared by electrochemical method on monocrystalline silicon wafers.The results showed that contour root-mean-square deviation and average diameter of grain of porous silicon present periodic change,under the corrosive factors of 10 mA/cm2 and 1875 seconds,the above indicators of porous silicon are much bigger.The analysis of AFM and SEM showed that the maximum height,the maximum diameter and average diameter of silicon pillars achieved 470 nm,1693.590 nm and 489.954 nm respectively.关键词
石墨电极/多孔硅/轮廓均方根偏差/颗粒平均直径/电化学方法/碳原子剥离Key words
graphite electrode / porous silicon/ contour root-mean-square deviation/ electrochemical methods/ peel of carbon atoms分类
信息技术与安全科学引用本文复制引用
李进,庞骏敏,高忙忙,梁森,王晓芳,薛子文..采用石墨电极制备多孔硅工艺研究[J].硅酸盐通报,2013,32(7):1394-1396,3.基金项目
宁夏自治区2012科技支撑计划项目 （）
