光学精密工程2013，Vol.21Issue(8)：1929-1935,7.DOI:10.3788/OPE.20132108.1929
用计算全息图校正非球面的畸变
Correction of distortion in asphere testing with computer-generated hologram
摘要
Abstract
On the basis of the asymmetric distortion from asphere measurement by a Computer-generated Hologram(CGH),three basic distortion models were analyzed,and an effective correction method for asymmetric distortion was proposed.By using a few fitted parameters,the method can correct the asymmetric distortion accurately,reduce data point pairs needed by distortion correction and can avoid over-fitting effect.Furthermore,the distortion of whole interferometric system was simulated,and its distortion was corrected by the proposed method.The simulating result shows that the relative residual of the correction is less than 0.2 ％.Finally,an off-axis CGH was designed and fabricated to verify the reliability of the correcting method and an asphere surface was tested with this CGH.Then,the correcting method mentioned above was used to correct the testing result,and the correcting result was taken to fabricate the asphere iteratively.The experiments show that the aspheric surface figure converges at 1.8 nm RMS (Root Mean Square) eventually.These results verify the reliability of the correction method.关键词
非球面检测/畸变校正/干涉仪/计算全息图Key words
aspheric surface testing/distortion correction/interferometer/Computer-generated Hologram(CGH)分类
数理科学引用本文复制引用
高松涛,王高文,张健,隋永新,杨怀江..用计算全息图校正非球面的畸变[J].光学精密工程,2013,21(8):1929-1935,7.基金项目
国家重大专项资金资助项目(No.2009ZX02205) （No.2009ZX02205）
