强激光与粒子束2013，Vol.25Issue(9)：2270-2274,5.DOI:10.3788/HPLPB20132509.2270
大口径光学元件气囊抛光工具刚度可控性
Controllability of stiffness of bonnet tool polishing large aspheric lenses
摘要
Abstract
The controllability of stiffness of bonnet tool polishing large aspheric lenses was studied,aiming to ensure the high stability and uniform removal rate of bonnet tool in polishing process.After analyzing the force situation of bonnet tool when polishing large aspheric lenses,the stiffness of the bonnet tool was calculated,and then influencing factors of stiffness of bonnet tool and the effects brought by stiffness of bonnet in polishing process were discussed.After that,control algorithm of bonnet tool was designed and simulated experiments were carried out,the results revealed that the controllability of stiffness of bonnet tool in polishing process could be achieved,which verified the correctness of the control algorithm.关键词
大口径光学元件/气囊抛光/工具刚度/可控性Key words
large aspheric lenses/ bonnet polishing/ stiffness/ controllability分类
矿业与冶金引用本文复制引用
王振忠,潘日,郭隐彪,张东旭,谢银辉,王健..大口径光学元件气囊抛光工具刚度可控性[J].强激光与粒子束,2013,25(9):2270-2274,5.基金项目
国家自然科学基金项目(51075343) （51075343）
厦门市科技计划项目(3502220113007) （3502220113007）
厦门大学研究生基础创新科研基金项目(201212G011) （201212G011）
