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Averaged hole mobility model of biaxially strained Si

Song Jianjun Zhu He Yang Jinyong Zhang Heming Xuan Rongxi Hu Huiyong

半导体学报(英文版)2013,Vol.34Issue(8):15-18,4.
半导体学报(英文版)2013,Vol.34Issue(8):15-18,4.DOI:10.1088/1674-4926/34/8/082003

Averaged hole mobility model of biaxially strained Si

Averaged hole mobility model of biaxially strained Si

Song Jianjun 1Zhu He 1Yang Jinyong 2Zhang Heming 1Xuan Rongxi 1Hu Huiyong1

作者信息

  • 1. Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University,Xi'an 710071, China
  • 2. Beijing Research Institute of Precise Mechatronic Controls, Beijing 100076, China
  • 折叠

摘要

关键词

strain/ model/ mobility

Key words

strain/ model/ mobility

引用本文复制引用

Song Jianjun,Zhu He,Yang Jinyong,Zhang Heming,Xuan Rongxi,Hu Huiyong..Averaged hole mobility model of biaxially strained Si[J].半导体学报(英文版),2013,34(8):15-18,4.

基金项目

Project supported by the Research Fund for the Doctoral Program of Higher Education of China (No.JY0300122503) and NLAIC Research Fund (No.P140c090303110c0904). (No.JY0300122503)

半导体学报(英文版)

OACSCDCSTPCDEI

1674-4926

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