无机材料学报2013，Vol.28Issue(7)：769-774,6.DOI:10.3724/SP.J.1077.2013.12498
V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响
Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films
摘要
Abstract
A series of TaVN composite films with different V contents were fabricated by magnetron sputtering technique.The microstructures,mechanical properties,friction properties at different temperatures were investigated by X-ray diffraction,nano-indentation,CSM high-temperature ball-on-disc tribo-meter,respectively.The resuits show that the microstructure of TaVN films has fcc structure.With V content increasing,the preferential orientation changes from(111)to(200),and the hardness increases to a peak value(32.3 GPa)and then decreases.At room temperature,the friction coefficient of TaVN films decreases as V content increases,which may be related to the formation of V2O5.When the temperatures increase from room temperature to 800℃,the friction coefficient increases and then decreases.The friction mechanisms of TaVN composite films and TaN film at high temperature are compared based on the crystal chemistry theory.关键词
TaVN复合膜/磁控溅射/力学性能/摩擦性能Key words
TaVN composited films/magnetron sputtering technique/mechanical properties/friction properties分类
矿业与冶金引用本文复制引用
许俊华,薛雅平,曹峻,喻利花..V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响[J].无机材料学报,2013,28(7):769-774,6.基金项目
国家自然科学基金(51074080) （51074080）
江苏省自然科学基金(BK2008240).National Natural Science Foundation of China(51074080) （BK2008240）
Natural Science Foundation of Jiangsu Province(BK2008240) （BK2008240）
