重庆理工大学学报（自然科学版）2013，Vol.27Issue(8)：36-40,5.DOI:10.3969/j.issn.1674-8425(z).2013.08.008
基于光学非球面的大尺寸精密检测平台技术
Study on Large Scale Precision Measurement Platform for Optical Aspheric Lens
摘要
Abstract
According to the requirement of precision measurement for optical aspheric surface,this paper presents a measuring and control means,which is based on large scale high-precision measurement platform.Through analyzing the off-machine measuring principle,a large scale measurement platform included high-precision linear motors,contacting and non-contacting measurement sensor of 0.1 um resolution and a new developed of measuring software,is designed and built.Aiming at the measurement characteristics of optical aspheric lens,measuring software is developed to achieve surface metrology and evaluation for large scale optical aspheric lens.The experiment results indicated that the measuring system has met the needs of high-precision measurement.关键词
光学非球面/检测平台/离线测量/大尺寸/高精度Key words
optical aspheric lens/ measurement platform/ off-machine measurement/ large scale/ high-precision分类
机械制造引用本文复制引用
柯晓龙,刘建春,黄海滨,郭隐彪..基于光学非球面的大尺寸精密检测平台技术[J].重庆理工大学学报（自然科学版）,2013,27(8):36-40,5.基金项目
福建省自然科学基金资助项目(2012J05102) （2012J05102）
厦门理工学院高层次人才引进项目(YKJ11029) （YKJ11029）
