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The effect of the multi-period on the properties of deep-ultraviolet transparent conductive Ga2O3/ITO alternating multilayer films

Xu Chengyang Yan Jinliang Li Chao Zhuang Huihui

半导体学报（英文版）2013，Vol.34Issue(10)：26-30,5.

半导体学报（英文版）2013，Vol.34Issue(10)：26-30,5.DOI:10.1088/1674-4926/34/10/103004

The effect of the multi-period on the properties of deep-ultraviolet transparent conductive Ga2O3/ITO alternating multilayer films

Xu Chengyang ¹Yan Jinliang ¹Li Chao ¹Zhuang Huihui¹

作者信息

1. School of Physics and Optoelectronic Engineering, Ludong University, Yantai 264025, China
折叠

摘要

关键词

transparent conductive film/ alternating multilayer film/ deep ultraviolet/ multi-period/ gallium oxide/indium tin oxide

Key words

transparent conductive film/ alternating multilayer film/ deep ultraviolet/ multi-period/ gallium oxide/indium tin oxide

引用本文复制引用

Xu Chengyang,Yan Jinliang,Li Chao,Zhuang Huihui..The effect of the multi-period on the properties of deep-ultraviolet transparent conductive Ga2O3/ITO alternating multilayer films[J].半导体学报（英文版）,2013,34(10):26-30,5.

基金项目

Project supported by the National Natural Science Foundation of China (No.10974077),the National Science Foundation of Shandong Province,China (No.2009ZRB01702),and the Shandong Province Higher Educational Science and Technology Program,China (No.J10LA08). （No.10974077）

半导体学报（英文版）

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ISSN：1674-4926

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