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An integrated MEMS piezoresistive tri-axis accelerometer

Zhang Yongping He Changde Yu Jiaqi Du Chunhui Zhang Juanting Chou Xiujian Zhang Wendong

半导体学报（英文版）2013，Vol.34Issue(10)：76-82,7.

半导体学报（英文版）2013，Vol.34Issue(10)：76-82,7.DOI:10.1088/1674-4926/34/10/104009

An integrated MEMS piezoresistive tri-axis accelerometer

Zhang Yongping ¹He Changde ²Yu Jiaqi ¹Du Chunhui ²Zhang Juanting ¹Chou Xiujian ²Zhang Wendong¹

作者信息

1. Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China,Taiyuan 030051, China
2. Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051,China
折叠

摘要

关键词

accelerometer/ integration/ piezoresistive/ tri-axis/ MEMS

Key words

accelerometer/ integration/ piezoresistive/ tri-axis/ MEMS

引用本文复制引用

Zhang Yongping,He Changde,Yu Jiaqi,Du Chunhui,Zhang Juanting,Chou Xiujian,Zhang Wendong..An integrated MEMS piezoresistive tri-axis accelerometer[J].半导体学报（英文版）,2013,34(10):76-82,7.

基金项目

Project supported by the National Science and Technology Cooperation Program of China (No.61011140351). （No.61011140351）

半导体学报（英文版）

OACSCDCSTPCDEI

ISSN：1674-4926

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