高电压技术2013，Vol.39Issue(10)：2526-2531,6.DOI:10.3969/j.issn.1003-6520.2013.10.029
中频脉冲直流磁控放电等离子体仿真
Simulation of Discharge Plasma in Mid-frequency Pulsed DC Magnetron
摘要
关键词
pulsed DC/magnetron sputtering/discharge/plasma/particle simulationKey words
pulsed DC/magnetron sputtering/discharge/plasma/particle simulation引用本文复制引用
邱清泉,屈飞,古宏伟,张国民,戴少涛..中频脉冲直流磁控放电等离子体仿真[J].高电压技术,2013,39(10):2526-2531,6.基金项目
Project supported by National Natural Science Foundation of China (50907071,51277172). （50907071,51277172）
