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GaN nanopillars with a nickel nano-island mask

Lin Zengqin Xiu Xiangqian Zhang Shiying Hua Xuemei Xie Zili Zhang Rong Chen Peng

半导体学报（英文版）2013，Vol.34Issue(12)：21-25,5.

半导体学报（英文版）2013，Vol.34Issue(12)：21-25,5.DOI:10.1088/1674-4926/34/12/123001

GaN nanopillars with a nickel nano-island mask

Lin Zengqin ¹Xiu Xiangqian ¹Zhang Shiying ¹Hua Xuemei ¹Xie Zili ¹Zhang Rong ¹Chen Peng¹

作者信息

1. Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China
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摘要

关键词

GaN nanopillars/ nickel nano-island/ thermal ammonia etching/ mask/ ICP/ SEM

Key words

GaN nanopillars/ nickel nano-island/ thermal ammonia etching/ mask/ ICP/ SEM

引用本文复制引用

Lin Zengqin,Xiu Xiangqian,Zhang Shiying,Hua Xuemei,Xie Zili,Zhang Rong,Chen Peng..GaN nanopillars with a nickel nano-island mask[J].半导体学报（英文版）,2013,34(12):21-25,5.

基金项目

Project supported by the Special Funds for Major State Basic Research Project (Nos.2011CB301900,2012CB619304,2010CB327504),the Hi-Tech Research Project (No.2011AA03A103),the National Natural Science Foundation of China (Nos.60990311,61274003,60936004,61176063),and the Natural Science Foundation of Jiangsu Province (No.BK2011010). （Nos.2011CB301900,2012CB619304,2010CB327504）

半导体学报（英文版）

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ISSN：1674-4926

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