首页|期刊导航|半导体学报（英文版）|Design of a Bionic Cilia MEMS three-dimensional vibration sensor

Design of a Bionic Cilia MEMS three-dimensional vibration sensor

Li Zhen Zhang Guojun Xue Chenyang Wu Shujuan

半导体学报（英文版）2013，Vol.34Issue(11)：88-94,7.

半导体学报（英文版）2013，Vol.34Issue(11)：88-94,7.DOI:10.1088/1674-4926/34/11/114015

Design of a Bionic Cilia MEMS three-dimensional vibration sensor

Li Zhen ¹Zhang Guojun ²Xue Chenyang ¹Wu Shujuan²

作者信息

1. Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, Taiyuan 030051, China
2. Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
折叠

摘要

关键词

vibration sensor/ MEMS, bionic/ ANSYS

Key words

vibration sensor/ MEMS, bionic/ ANSYS

引用本文复制引用

Li Zhen,Zhang Guojun,Xue Chenyang,Wu Shujuan..Design of a Bionic Cilia MEMS three-dimensional vibration sensor[J].半导体学报（英文版）,2013,34(11):88-94,7.

基金项目

Project supported by the National High Technology Research and Development Program of China (No.2011AA040404),the Young Scientists Fund of the National Natural Science Foundation of China (No.51205374),and the Special Funds of the National Natural Science Foundation of China (No.61127008). （No.2011AA040404）

半导体学报（英文版）

OACSCDCSTPCDEI

ISSN：1674-4926

访问量0

下载量0

段落导航