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Design and measurement of a piezoresistive ultrasonic sensor based on MEMS

Yu Jiaqi He Changde Yuan Kejing Lian Deqin Xue Chenyang Zhang Wendong

半导体学报（英文版）2013，Vol.34Issue(7)：116-122,7.

半导体学报（英文版）2013，Vol.34Issue(7)：116-122,7.DOI:10.1088/1674-4926/34/7/074013

Design and measurement of a piezoresistive ultrasonic sensor based on MEMS

Yu Jiaqi ¹He Changde ²Yuan Kejing ¹Lian Deqin ²Xue Chenyang ¹Zhang Wendong²

作者信息

1. Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China,Taiyuan 030051, China
2. Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051,China
折叠

摘要

关键词

MEMS/ piezoresistive/ ultrasonic sensor/ ANSYS/ membrane-beams

Key words

MEMS/ piezoresistive/ ultrasonic sensor/ ANSYS/ membrane-beams

引用本文复制引用

Yu Jiaqi,He Changde,Yuan Kejing,Lian Deqin,Xue Chenyang,Zhang Wendong..Design and measurement of a piezoresistive ultrasonic sensor based on MEMS[J].半导体学报（英文版）,2013,34(7):116-122,7.

基金项目

Project supported by the National Natural Science Foundation of China (No.61127008). （No.61127008）

半导体学报（英文版）

OACSCDCSTPCDEI

ISSN：1674-4926

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