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1.3-μm 1×4 MMI coupler based on shallow-etched InP ridge waveguides

Guo Fei Lu Dan Zhang Ruikang Wang Baojun Zhang Xilin Ji Chen

半导体学报（英文版）2014，Vol.35Issue(2)：82-85,4.

半导体学报（英文版）2014，Vol.35Issue(2)：82-85,4.DOI:10.1088/1674-4926/35/2/024012

1.3-μm 1×4 MMI coupler based on shallow-etched InP ridge waveguides

Guo Fei ¹Lu Dan ¹Zhang Ruikang ¹Wang Baojun ¹Zhang Xilin ¹Ji Chen¹

作者信息

1. Key Laboratory of Semiconductor Materials, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
折叠

摘要

关键词

MMI/ shallow etched waveguide/ beam propagation method

Key words

MMI/ shallow etched waveguide/ beam propagation method

引用本文复制引用

Guo Fei,Lu Dan,Zhang Ruikang,Wang Baojun,Zhang Xilin,Ji Chen..1.3-μm 1×4 MMI coupler based on shallow-etched InP ridge waveguides[J].半导体学报（英文版）,2014,35(2):82-85,4.

基金项目

Project supported by the National Natural Science Foundation of China (Nos.61274046,61201103) and the National High Technology Research and Development Program of China (No.2013AA014202). （Nos.61274046,61201103）

半导体学报（英文版）

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ISSN：1674-4926

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