红外与毫米波学报2014，Vol.33Issue(1)：45-49,5.DOI:10.3724/SP.J.1010.2014.00045
全息光刻和二次显影法制备柱形二维光子晶体
Fabrication of column shape two dimensional photonic crystals: double developments in holographic lithography process
摘要
关键词
全息光刻/二维光子晶体/柱形/二次显影Key words
holographic lithography/two dimensional photonic crystals/column shape/double developments分类
信息技术与安全科学引用本文复制引用
曹远迎,张永刚,李耀耀,顾溢,李爱珍,李好斯白音..全息光刻和二次显影法制备柱形二维光子晶体[J].红外与毫米波学报,2014,33(1):45-49,5.基金项目
Supported by the National Basic Research Program of China under grant No.2012CB619200,the National Natural Science Foundation of China under grant No.61275113 and 61204133 （）
