传感技术学报Issue(6)：834-837,4.DOI:10.3969/j.issn.1004-1699.2013.06.016
一种大量程加速度传感器的性能测试
Performance Testing of a High Range Accelerometer
摘要
Abstract
A high range accelerometer with a pair of double-clamped beam-mass structure can measure in-plan accel-eration. Machete hammer and Hopkinson bar are used to test the sensitivity and the dynamic response of the sensor. The results show that the sensitivity of the sensor is 0. 126 μV/gn,working frequency is 21. 46 kHz,the dynamic repeatability of working band is 3. 9%,meeting the actual requirements. To achieve triaxial accelerometerthe sensors on single-chip integration of three independent mass structure the reference data are provided.关键词
加速度传感器/大量程/马歇特锤/Hopkinson杆Key words
accelerometer/high measure range/Machete hammer/Hopkinson bar分类
信息技术与安全科学引用本文复制引用
周智君,石云波,唐军,丁宇凯..一种大量程加速度传感器的性能测试[J].传感技术学报,2013,(6):834-837,4.基金项目
国防科工委国防基础科研项目基金项目(A3320110004) （A3320110004）
