传感技术学报Issue(10)：1357-1363,7.DOI:10.3969/j.issn.1004-1699.2013.10.008
倾斜梳齿的MEMS电容式加速度传感器自我标定特性研究
Study of Self-Calibration of MEMS Capacitive Accelerometer with Non-Parallel Combs
摘要
Abstract
This paper studies the self-calibration of MEMS capacitive accelerometer to simulate the vibrator to increase the efficiency and reduce the cost of calibration,and analyses the effect of DRIE fabrication error on self-calibration of sensors theoretically. The gap of the sensor used in this paper is 4 μm,and the thickness is 80 μm. The self-calibration of sensors simulates the calibration of mechanical vibrator which is vibrating at an amplitude of 1 gn. As the combs of the capacitive sensors fabricated by deep reactive ion etching(DRIE)exist plus-minus slope angle α,this paper analyses the effect of the slope angle on the self-calibration of MEMS capacitive accelerometer. The results show that the error caused by slope angle is obvious,which gets more obvious with bigger slope angle in open loop circuit. Comparing with the self-calibration of parallel comb sensors,the error of self-calibration is about 10% when the slope angle is ±0. 1°;27% when the slope angle is 0. 5°;and pull-in occurs when the slope angle is-0. 5°. It proves that in open-loop circuit,the slope angle affacts the self-calibration obviously. But the error gets much lower when sensor is in close loop circuit. When the slope angle is less then±0. 5°,the error of self-calibration is less than 0. 6%,which is close to the error of the absolute calibration of Laser Interferometer(0. 5% ~1%),and proves that the method of self-calibration is practicable. Meanwhile,this paper analyses the reasons how slope angle affact self-calibration,and come up with an idea which can lower the error of self-calibration that caused of slope angle in open loop circuit and state the specific measure.关键词
MEMS/电容式加速度传感器/自我标定/正负侧壁倾斜角Key words
MEMS/capacitive accelerometer/self-calibration/plus-minus slope angle分类
信息技术与安全科学引用本文复制引用
董林玺,楼进峰..倾斜梳齿的MEMS电容式加速度传感器自我标定特性研究[J].传感技术学报,2013,(10):1357-1363,7.基金项目
国家自然科学基金项目(60506015) （60506015）
浙江省自然科学基金项目(Y107105) （Y107105）
GHz频率机械耦合阵列组合的盘结构电容式微机械谐振器关键技术研究项目(61376117) （61376117）
规模集成振动微机械谐振器的静电调谐技术研究项目(LY13F040004) （LY13F040004）
