传感技术学报Issue(12)：1671-1675,5.DOI:10.3969/j.issn.1004-1699.2013.12.009
激光偏振干涉纳米定位系统的设计与实验研究
Design and Experimental Study of Polarimetric Interferometric Nanopositioing System
摘要
Abstract
Aiming at the requirement of higher accuracy of positioning in industry and metrology, a positionning method is proposed based on polarimetric interferometer. In this interferometric system,a polarimeter combined with polarization beamsplitter and polarizer has replaced photo-detector. The fringe interpolation of output laser beam can be reached at 36 000,for a 633 nm laser source,the potential theoretical resolution is 10 pm. The measurements have both carried out by own-developed polarimetric interferometer and commercial SIOS interferometer. The comparison results between this two interferometer show that the polarimetric interferometer is feasible. The experiments have also been done to get the quantified value for each source of errors. Under standard experimental environment,according to uncertainty evaluation,the total uncertainty of measurement is less than 1. 4 nm over mi-crometric displacement range. This method can be dedicated to various fields of nano-positioning.关键词
偏振干涉/定位控制/实验研究/误差分析Key words
polarimetric interferometric/positioning control/experimental study/error analysis分类
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许素安,钱飞,谢敏,黄艳岩,富雅琼,陈乐,孙坚..激光偏振干涉纳米定位系统的设计与实验研究[J].传感技术学报,2013,(12):1671-1675,5.基金项目
国家自然科学基金项目(51105348) （51105348）
第45批教育部留学回国启动基金项目(2013R10066) （2013R10066）
浙江省钱江人才计划项目(2013R1066) （2013R1066）
