传感技术学报Issue(12)：1686-1690,5.DOI:10.3969/j.issn.1004-1699.2013.12.012
一种硅微机械结构振动幅度的电学测量方法及实验研究
Electrical Measurement Method and Experiment Study on Vibration Amplitude for a Silicon Micro-Structure
摘要
Abstract
Drawback of computer aided vision measurement method presents because of the package of the silicon micromachined structure system, that the vibration amplitude accuracy of mechanical system is affected by the interface circuit parameters for electrical measurement. A model for silicon resonant structure with driving combs and sensing parallel plates is constructed and a new electrical measurement is also proposed based on single sideband ration. Experiment result show that the vibration amplitude is 0. 25 μm for a resonant micro accelerometer with 20 kHz AC driving voltage. Spectral analysis also showed the presence of vibration amplitude caused by electrical noise,this test method can also be applied to measure the resonant frequency for silicon micro structure.关键词
硅微机械结构/振动幅度/单边带比/频谱Key words
silicon micromachined structure/vibration amplitude/single sideband ration/frequency spectrum分类
信息技术与安全科学引用本文复制引用
刘恒,范江棋,孟瑞丽,李宏升,张宏群,周吴..一种硅微机械结构振动幅度的电学测量方法及实验研究[J].传感技术学报,2013,(12):1686-1690,5.基金项目
江苏省自然科学基金项目(BK20131001) （BK20131001）
江苏省高校自然科学研究基金项目(13KJB510017) （13KJB510017）
江苏省气象探测与信息处理重点实验室开放课题项目(KDX1109) （KDX1109）
