传感技术学报Issue(3)：316-319,4.DOI:10.3969/j.issn.1004-1699.2014.03.008
湿度对微型加速度计粘连失效的影响
The Adhesion Failure in the MEMS Accelerator Influenced by Relative Humudity
摘要
Abstract
Adhesion is a well-known failure mode in micro-electromechanical systems( MEMS) ,most of them are in-fluenced by relative humidity. The capacitive MEMS micro-accelerator is studied,the theory of adhesion influenced by relative humidity is analyzed, especially the capillary force. In order to investigate the adhesion influenced by different material and surface condition,the material W,AlCu and Al are used. Al is approved to be a good material with high contact angle and roughness, and the adhesion occurred on the Al electrode surface is the least. The HMDS is also used to deal with the inner surface of the MEMS chip,which is a good way to decrease adhesion. It is proved that choosing electrode material with high contact angel and large roughness,processing the contact surface with hydrophobic layers are good method to decrease adhesion dominated by relative humidity.关键词
MEMS/粘连/毛细黏性力/粗糙度/HMDS(六甲基二硅胺烷)Key words
MEMS/adhesion/capillary force/roughness/HMDS分类
航空航天引用本文复制引用
宋运康,赵坤帅,闫鑫,李川..湿度对微型加速度计粘连失效的影响[J].传感技术学报,2014,(3):316-319,4.基金项目
863预研课题项目(2011AA110102) （2011AA110102）
国家国际科技合作项目专项项目(2011DFA72370) （2011DFA72370）
