自动化与信息工程Issue(3)：42-44,48,4.
利用压电陶瓷产生标准间隙的装置设计
Design of Standard Clearance Equipment Based on Piezoelectric Ceramics
摘要
Abstract
This paper researches on generation of continuous and adjustable standard clearance equipment with piezoelectric ceramics. The key technology and parts including piezoelectric actuator, voltage driver PID closed-loop control system and DC power supply drive are researched. The whole equipment is tested. The deflection rangeθX andθY of the system is from 1 mrad to 12 mrad, and the travel range of Z direction is from 7μm to 60μm. The system realizes millisecond response speed and micro-arc positioning accuracy. Its deflection of the largest range is ±6 mrad. The equipment is high accuracy, short of measuring chain, high reading accuracy and continuously adjustable.关键词
压电陶瓷/压电效应/逆压电效应/标准间隙/装置设计Key words
Piezoelectric Ceramics/Piezoelectric Effect/Inverse Piezoelectric Effect/Standard Clearance/Equipment Design引用本文复制引用
李淑映..利用压电陶瓷产生标准间隙的装置设计[J].自动化与信息工程,2013,(3):42-44,48,4.
