硅酸盐学报Issue(12)：1685-1691,7.DOI:10.7521/j.issn.0454-5648.2013.12.15
二氧化钒纳米孔洞薄膜的光学特性
Optical Properties of Vanadium Dioxide Film with Nano-holes
摘要
Abstract
To improve the optical properties of vanadium dioxide (VO2) film, a mathematical model describing the optical properties of VO2 film with nano-periodic holes was proposed based on the effective medium approximation theory. The VO2 films were depos-ited on quartz substrates via magnetron sputtering and oxidation annealing. The VO2 films with nano-holes were fabricated by ion beam etching with the mask of porous alumina. The theoretical analysis and experimental results show that the minimum value of the reflectance moves toward a shorter wavelength when the porosity increases. The transmittance of the VO2 film with nano-holes is better than that of the VO2 film deposited on quartz substrate. The transmittance is increased by 20%in the infrared region. The VO2 film with nano-holes has better thermochromic properties for some potential applications.关键词
二氧化钒/薄膜/孔洞/有效介质理论/透过率Key words
vanadium dioxide/film/hole/effective medium theory/transmittance分类
通用工业技术引用本文复制引用
梁倩,陈少娟,陈建坤,郑鸿柱,袁文瑞,李毅,方宝英,严梦,王锋,覃源,丁杰,佟国香,王晓华..二氧化钒纳米孔洞薄膜的光学特性[J].硅酸盐学报,2013,(12):1685-1691,7.基金项目
国家“863”计划项目(2006AA03Z348)；教育部科学技术研究重点项目(207033)；上海市科学技术委员会科技攻关计划项目(06DZ11415)；上海市教育委员会科技创新重点项目(10ZZ94)；区域光纤通信网与新型光通信系统国家重点实验室开放基金和上海领军人才培养计划资助项目。 （2006AA03Z348）
