激光技术Issue(1)：119-123,5.DOI:10.7510/jgjs.issn.1001-3806.2014.01.026
激光外差干涉仪相位计的设计
Design of phase comparator in a laser heterodyne interferometer
摘要
Abstract
Phase comparison of the heterodyne signal determines the performance of the heterodyne interferometer to some extent,such as precision and resolution.To resolve the conflict between the resolution and the velocity,methods used presently to design the phase comparator were introduced and analyzed.Key design points to achieve high measureable velocity with fine resolution were discussed.Solutions to the problems were also proposed.The full period sampling method based on field-programmable gate array(FPGA)can improve the precision of autocorrelation and the zero-across detection with frequency mixing can improve the test speed.关键词
测量与计量/外差干涉/比相计/相位测量Key words
measurement and metrology/heterodyne interferometry/phase comparator/phase measurement分类
机械制造引用本文复制引用
乐燕芬,李霄夏,句爱松..激光外差干涉仪相位计的设计[J].激光技术,2014,(1):119-123,5.基金项目
国家自然科学基金资助项目（51075280）；上海市大学生创新创业训练计划资助项目 （）
