激光技术Issue(3)：330-334,5.DOI:10.7510/jgjs.issn.1001-3806.2014.03.010
水辅助激光刻蚀氧化铝陶瓷的研究
Research of water-assisted laser etching of alumina ceramics
摘要
Abstract
To obtain better result of laser etching , micro-machining of alumina ceramics with ultraviolet ( UV) laser (355nm) was conducted in air and water respectively .The impact of laser parameters, such as laser fluence, scan speed, and laser frequency on the etching depth was investigated .The mechanism of laser etching and the physical process of water-assisted etching were studied .Etching morphology in air and water with UV laser and etching depth with different laser parameters were obtained .The results show that water-assisted laser etching can improve the etching efficiency and etching surface quality .The etching depth has close relationship with laser fluence , scan speed , laser frequency and water depth .The water cooling effect and vacuum occurring during water-assisted etching could prevent the secondary adhesion to the eclipse material effectively and the formation of metamorphic layer .关键词
激光技术/水辅助加工/氧化铝陶瓷/表面刻蚀Key words
laser technique/water-assisted machining/alumina ceramics/surface etching分类
信息技术与安全科学引用本文复制引用
孔令瑞,张菲,段军,罗瑞峰,曾晓雁..水辅助激光刻蚀氧化铝陶瓷的研究[J].激光技术,2014,(3):330-334,5.基金项目
国家自然科学基金资助项目 （）
