现代制造工程Issue(8)：68-71,4.
高频超声换能器频率混叠现象的分析与优化
Frequency alias analysis and optimization of high frequency ultrasonic transducer for wire bonding application
摘要
Abstract
The decrease of the pin pitch and the reduction of the bonding temperature urgently demand higher frequency ultrasonic transducer.The Finite Element Model (FEM) of the ultrasonic transducer working at 135kHz was built by the commercial soft-ware ANSYS10.0.The vibrating modes near the working frequency were investigated .Closely to the working mode ,there were some un-wanted modes that could be easily excited and would have a great effect on the bonding quality .The size of the transduc-er was optimized based on sensitivity analysis ,and the minimum interval of the frequencies between the working mode and the un -wanted modes was increased from 0.7kHz to 4.6kHz,which effectively inhibited the frequency aliasing .At last,the impedance characteristics of the transducer were tested using an impedance analyzer ,and the simulation results agreed well with the meas-ured ones.关键词
频率混叠/超声换能器/引线焊接/灵敏度分析Key words
frequency alias/ultrasonic transducer/wire bonding/sensitivity analysis引用本文复制引用
张震,孟凡豪,刘仲武..高频超声换能器频率混叠现象的分析与优化[J].现代制造工程,2013,(8):68-71,4.基金项目
浙江省自然基金项目 （）
