机电工程技术Issue(9)：32-37,6.DOI:10.3969/j.issn.1009-9492.2013.09.009
半导体制造中具有重入加工工艺的双臂组合设备的调度研究*
Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting in Semiconductor Manufacturing
摘要
Abstract
It is very difficult to solve the scheduling problem of dual-arm cluster tools with wafer revisiting. If swap strategy is applied,it forms a three wafer periodical process with three wafers completed in each period. In order to improve the performance of the system, scheduling algorithms are presented based on 2-wafer cyclic scheduling. The algorithms consist of analytical expressions. Therefore,it is very efficient. Compared with the 2-wafer scheduling by 3-wafer scheduling,it is efficient to check which scheduling method is better for the system. Finally,an illustrative example is given to shown the application of the results.关键词
半导体制造/组合设备/Petri网/调度Key words
semiconductor manufacturing/cluster tools/Petri net/scheduling分类
数理科学引用本文复制引用
付虎,伍乃骐,乔岩..半导体制造中具有重入加工工艺的双臂组合设备的调度研究*[J].机电工程技术,2013,(9):32-37,6.基金项目
国家自然科学基金 （）
