机电工程技术Issue(9)：91-95,5.DOI:10.3969/j.issn.1009-9492.2013.09.024
PZT压电式微传感器的结构优化
The Structure Optimization of PZT Micro Pressure Sensor
田开云 1谭晓兰1
作者信息
- 1. 北方工业大学机电工程学院，北京 100041
- 折叠
摘要
Abstract
The sensitivity of the PZT piezoelectric micro pressure sensor has relations with the size of cantilever, processing technology and piezoelectric material itself, in addition to this, it also has relations with the cross-sectional shape of the cantilever. This article discusses the relationship between the variable cross-section length and the deflection angle with the sensitivity of PZT piezoelectric pressure micro-sensor, under a given external force F and the amount of piezoelectric material, create a mathematical optimization model with constrains, after this, we use genetic algorithms to solve this model to get the values of the variables, this operation can generate the largest charge by the piezoelectric effect,thereby improving the sensitivity of the micro-sensor.关键词
微压力传感器/PZT材料/变截面/遗传算法Key words
micro pressure sensor/PZT material/variable cross-section/genetic algorithms分类
信息技术与安全科学引用本文复制引用
田开云,谭晓兰..PZT压电式微传感器的结构优化[J].机电工程技术,2013,(9):91-95,5.
