苏州科技学院学报（自然科学版）Issue(1)：39-42,47,5.
MEMS热驱动可变电容的有限元模拟研究
Application of finite element method in the MEMS thermal variable capacitor
摘要
Abstract
A Micro Electro Mechanical Systems (MEMS) thermal variable capacitor has been designed and ana-lyzed. Its lower capacitor plate is fixed on the substrate while the upper plate connected by four thermal micro actuators can move up or down depending on the thermal stimulation. Each actuator is composed of two cold arms and two hot arms. The capacitance decreases rapidly resulting from the deformation of the thermal actuators un-der the applied voltage. The simulation of finite element method shows that driven by 4 V, the capacitance value decreases to its 0.3 fold when the hot arms are 150 μm in length,and that it reduces to its 0.1 fold when the hot arms are 300μm long.关键词
MEMS设计/有限元分析/可变电容/热驱动器Key words
MEMS design/finite element analysis/variable capacitor/thermal actuator分类
信息技术与安全科学引用本文复制引用
沈娇艳,陈立军,程新利,臧涛成..MEMS热驱动可变电容的有限元模拟研究[J].苏州科技学院学报（自然科学版）,2014,(1):39-42,47,5.基金项目
国家自然科学基金委青年基金项目（51301116）；江苏省产学研前瞻性联合研究项目 （）
