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基于Add-drop型微环谐振腔的硅基高速电光调制器设计

曹彤彤 张利斌 费永浩 曹严梅 雷勋 陈少武

物理学报Issue(19):260-265,6.
物理学报Issue(19):260-265,6.DOI:10.7498/aps.62.194210

基于Add-drop型微环谐振腔的硅基高速电光调制器设计

Design of a high-speed silicon electro-optical modulator based on an add-drop micro-ring resonator

曹彤彤 1张利斌 1费永浩 1曹严梅 1雷勋 1陈少武1

作者信息

  • 1. 中国科学院半导体研究所,集成光电子学国家重点实验室,北京 100083
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摘要

Abstract

Silicon electro-optical modulators based on add-drop micro-ring resonators have the advantage of more freedom in designing high-extinction-ratio and large-bandwidth modulators without changing the ion doping processes of the chip. Here we design a high-speed silicon modulator based on an add-drop micro-ring resonator with a radius of 20 µm; it demonstrates high extinction ratio with low reverse bias. How the coupling between the straight waveguide and the ring resonator affects the performances is studied theoretically and it is found that a lower coupling coefficient at drop port leads to a higher extinction ratio but not the best bandwidth. Therefore, a balance should be considered between extinction ratio and bandwidth. According to the optimized result of the parameters the device is fabricated and tested. The spectrum testing indicates that the device can have 12 dB extinction ratio when it is operated at 3 V reverse bias. Furthermore, we have observed 8 Gbps open-eye diagram with only 1.2 V peak-to-peak signal voltage.

关键词

电光调制器/绝缘体上的硅/微环谐振腔/载流子色散效应

Key words

electrode-optical modulator/silicon on insulator/micro-ring resonator/free-carrier dispersion effect

引用本文复制引用

曹彤彤,张利斌,费永浩,曹严梅,雷勋,陈少武..基于Add-drop型微环谐振腔的硅基高速电光调制器设计[J].物理学报,2013,(19):260-265,6.

基金项目

国家自然科学基金(批准号:60837001,61021003)资助的课题 (批准号:60837001,61021003)

物理学报

OA北大核心CSCDCSTPCDSCI

1000-3290

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