物理学报Issue(19)：446-452,7.DOI:10.7498/aps.62.197401
MgB2超导膜的厚度与其Jc（5K,0T）的关系
Thickness dependence of critical current density in MgB2 films fabricated by hybrid physical-chemical vapor deposition
摘要
Abstract
MgB2 superconducting films with a thickness of 10 nm to 8 µm have been prepared on SiC substrates by hybrid physical-chemical vapor deposition (HPCVD). The study on Tc and Jc shows that as the film grows thicker, Tc increases and then keeps stable, which Jc increases at first, and then drops dramatically. We get the maximum Tc at 41.4 K and Jc at 2.3 × 108 A·cm−2. This also shows that we can use the method of HPCVD to prepare high-quality of clean MgB2 film. And its thickness can be from 10nm ultrathin films and 100 nm thin films up to 8 µm thick film. It is the first time so far as we know that Tc and Jc are studied in this range of thickness. This will lead to a complete and systematical understanding of the superconducting MgB2 films. And it is also important and practical to choose the thickness when preparing MgB2 films.关键词
MgB2超导膜/混合物理化学气相沉积法/厚度/临界电流密度Key words
MgB2 superconducting film/hybrid physical-chemical vapor deposition/thickness/critical current den-sity引用本文复制引用
陈艺灵,张辰,何法,王达,王越,冯庆荣..MgB2超导膜的厚度与其Jc（5K,0T）的关系[J].物理学报,2013,(19):446-452,7.基金项目
国家重点基础研究发展计划973(批准号:2006CD601004,2011CB605904,2011CBA00104)、国家自然科学基金(批准号51177160,11074008)和国家基础科学人才培养基金(批准号:J0630311)资助的课题 （批准号:2006CD601004,2011CB605904,2011CBA00104）
