物理学报Issue(4)：048501-1-048501-8,8.DOI:10.7498/aps.63.048501
超结硅锗碳异质结双极晶体管机理研究与特性分析优化
Mechanism and characteristic analysis and optimization of SiGeC hetero junction bip olar transistor with sup er junction
摘要
Abstract
A novel SiGeC heterojunction bipolar transistor (HTB) with super junction is presented. The effects of SiGeC base and super junction on device performance are analyzed in detail, and current transport mechanism of novel device is studied. Based on SiGeC/Si heterojunction technology, the high frequency characteristic of the novel device can be excellent. The breakdown voltage of device is improved greatly, because of two-dimensional direction of the electric field distribution in the collector region. The results show that the breakdown voltage of SiGeC HBT with super junction is increased by 48.8%, compared with that without super junction. More importantly, the introduction of super junction changes neither the high current gain nor the high frequency characteristics of SiGeC HBT. Compared with the Si bipolar transistor (BJT) with the same parameters, the novel device has a current gain that increases 10.7 times, and its cutoff frequency and maximum oscillation frequency are also improved greatly. A good trade-off is achieved among high current gain, high frequency and high breakdown voltage, in the novel SiGeC HBT with super junction. The layers and width of column region are designed to be optimal. With the increase in the number of column region layers, the breakdown voltage of the novel device is increased significantly, the current gain is improved somewhat, and the cutoff frequency and maximum oscillation frequency are reduced slightly. Taken together, the pnpn four-layer structure of super junction region is reasonable.关键词
硅锗碳/超结/异质结双极晶体管Key words
SiGeC/super junction/heterojunction bipolar transistor引用本文复制引用
刘静,郭飞,高勇..超结硅锗碳异质结双极晶体管机理研究与特性分析优化[J].物理学报,2014,(4):048501-1-048501-8,8.基金项目
国家自然科学基金(批准号:61204094)、高等学校博士学科点专项科研基金(批准号:20106118120003)和陕西省教育厅科学研究计划(批准号:11JK0924)资助的课题.* Project supported by the National Natural Science Foundation of China (Grant No.61204094), the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No.20106118120003), and the Specialized Scientific Research of the Education Bureau of Shaanxi, China (Grant No.11JK0924) （批准号:61204094）
