物理学报Issue(6)：067801-1-067801-6,6.DOI:10.7498/aps.63.067801
飞秒激光改性6H-碳化硅晶体表面光电导增益现象研究
Enhancement of surface photo conductivityin 6H-silicon carbide crystal mo dified by femtosecond laser pulse irradiation
摘要
Abstract
The photocurrent is very small when the visible light irradiates the semi-insulating silicon carbide. The femtosecond laser pulses are used to modify the silicon carbide surface, and the result shows that the photocurrent is enlarged several times according to the measurement results of photoconductivity. In order to explain the reasons for this change, some characterization means are employed, including the absorption, emission and X-ray photoelectron spectra. There are found some changes in the absorption spectra and emission spectra, and also in the silicon and carbon atom ratio according to the test results of X-ray photoelectron spectrum. We think that the changes of the crystal structure and atom ratio between silicon and carbon lead to the change of electronic energy band structure and the occurrence of many defect states. As a result, the photocurrents are improved in the range of visible light on the surface of 6H-SiC after the femtosecond laser pulses have irradiated the surface.关键词
光电导增益/6H碳化硅/飞秒激光Key words
photoconductivity/6H-SiC/femtosecond laser引用本文复制引用
高仁喜,高胜英,范光华,刘杰,王强,赵海峰,曲士良..飞秒激光改性6H-碳化硅晶体表面光电导增益现象研究[J].物理学报,2014,(6):067801-1-067801-6,6.基金项目
国家自然科学基金(批准号:11274082)和哈尔滨工业大学科研创新基金(批准号：HIT.NSRIF.2011121)资助的课题.@@@@Project supported by the National Natural Science Foundation of China (Grant No.11274082) and the Natural Scientific Research Innovation Foundation in Harbin Institute of Technology, China (Grant No. HIT.NSRIF.2011121) （批准号:11274082）
