太赫兹科学与电子信息学报Issue(1)：141-144,4.DOI:10.11805/TKYDA201401.0141
纯银材料的二次电子发射能谱研究
Research of secondary electron energy spectrum on pure silver material
摘要
Abstract
Secondary Electron(SE) spectrum can be measured by energy analyzer which is equipped on a newly-installed Ultra High Vaccum(UHV) measurement facility. True-secondary electrons and backscattered electrons can be distinguished from emitted electrons, and true-secondary electron yield can be measured by integral of SE spectrum. In this paper, an experiment was carried out on pure silver material to compare Secondary Electron Yield(SEY) by different methods(electrical current measurements and SE spectrum analysis). The comparison result shows that the error of the two methods is less than 6%, which validates the electrical current method. The cause of error is also been discussed.关键词
二次电子/二次电子发射/背散射电子/能谱Key words
Secondary Electron/secondary electron emission/backscattered electron/energy spectrum分类
信息技术与安全科学引用本文复制引用
杨晶,崔万照,胡天存,张娜..纯银材料的二次电子发射能谱研究[J].太赫兹科学与电子信息学报,2014,(1):141-144,4.基金项目
重点实验室基金资助项目(9140C530103110C5301) （9140C530103110C5301）
