中国电机工程学报Issue(12)：1965-1971,7.DOI:10.13334/j.0258-8013.pcsee.2014.12.017
溶胶-凝胶法在聚酰亚胺表面沉积氧化铝薄膜及性能
Fabrication and Properties of Polyimide Film with Aluminum Oxide Thin Films via Sol-Gel Method
摘要
Abstract
Aluminum oxide(Al2O3) thin films on polyimide (PI) substrate were prepared via sol-gel method based on surface modification and ion exchange technique. The composite films with Al2O3 layers were characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffractions (XRD) and Thermogravimentric analyses (TGA), respectively. The breakdown field strength and corona-resistant time of composite films were tested and compared with original PI film. Results from SEM, AFM and XRD measuring reveal that the Al2O3 thin films are compact and smooth layers which consists ofα-AlOOH,α′-AlOOH andβ-AlOOH with invisible particle. SEM on fracture surface of composite films shows that inorganic-organic interface is very clear and the thicknesses of the Al2O3 thin films are about 1μm. Results of TGA and breakdown field strength show that the thermal property and breakdown field strength of composite film decreases slightly. Corona-resistant test results show that the corona-resistant time of composite film is greatly improved compared with original PI film from 4.4min up to 104.6min, increasing by 23.8 times, which means that the corona-resistant life has a significant improvement.关键词
聚酰亚胺/溶胶凝胶法/表面处理/氧化铝薄膜/耐电晕性能Key words
polyimide/sol-gel method/aluminum oxide thin films/surface modification/corona-resistant property分类
信息技术与安全科学引用本文复制引用
张明玉,刘立柱,翁凌,周浩然,万胜..溶胶-凝胶法在聚酰亚胺表面沉积氧化铝薄膜及性能[J].中国电机工程学报,2014,(12):1965-1971,7.基金项目
国家自然科学基金项目(51177030)；黑龙江省自然科学重点基金项目(ZD201004)。@@@@supported by the National Natural Science Foundation of China(51177030) （51177030）
Program supported by the Natural Science Major Foundation of Heilongjiang Province of China (ZD201004) （ZD201004）
