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A 10-MHz SOI-Based Face Shear Square Micromechanical Resonator

Tan-Loc Nguyen Jing-Fu Bao Jun-Wen Jiang Yuan Ling Xin-Yi Li

电子科技学刊Issue(1)：64-70,7.

电子科技学刊Issue(1)：64-70,7.DOI:10.3969/j.issn.1674-862X.2014.01.013

A 10-MHz SOI-Based Face Shear Square Micromechanical Resonator

Tan-Loc Nguyen ¹Jing-Fu Bao ¹Jun-Wen Jiang ¹Yuan Ling ¹Xin-Yi Li¹

作者信息

1. the School of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
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摘要

关键词

Face shear mode/finite element simulation/micromechanical resonator/quality factor/silicon-on-insulator technology

Key words

Face shear mode/finite element simulation/micromechanical resonator/quality factor/silicon-on-insulator technology

引用本文复制引用

Tan-Loc Nguyen,Jing-Fu Bao,Jun-Wen Jiang,Yuan Ling,Xin-Yi Li..A 10-MHz SOI-Based Face Shear Square Micromechanical Resonator[J].电子科技学刊,2014,(1):64-70,7.

基金项目

This worked was supported by the National Natural Science Foundation of China and the China Academy of Engineering Physics under Grand No.11176006 （）

电子科技学刊

OACSCD

ISSN：1674-862X

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