中国光学Issue(6)：824-833,10.DOI:10.3788/CO.20130606.0824
表面改性碳化硅基底反射镜加工技术现状
Manufacture technology status of surface modified silicon carbide mirrors
摘要
Abstract
On the basis of the applications of surface modified silicon carbine mirrors in space optical systems , this paper summarizes the research status and developing trends of this kinds of mirrors at home and abroad .It introduces the widely used silicon carbide materials and their different properties , then gives several kinds of preparation technics of the silicon carbide mirror blanks , such as moulding , modification and different polis-hing methods .Based on the analysis of manufacture and modification process , a way to improve the manufac-ture technology of silicon carbide mirrors in China is summed up .关键词
光学加工/碳化硅/碳化硅反射镜/表面改性Key words
optical manufacture/silicon cabide/silicon cabide mirror/surface modification分类
机械制造引用本文复制引用
康健,宣斌,谢京江..表面改性碳化硅基底反射镜加工技术现状[J].中国光学,2013,(6):824-833,10.基金项目
国家高技术研究发展计划（863计划）资助项目 （）
