中国光学Issue(6)：906-911,6.DOI:10.3788/CO.20130606.0906
球面元件表面 AlF3薄膜的光学特性和微观结构表征
Characterization of optical and microstructural properties of AlF3 thin films deposited on spherical element
摘要
Abstract
Single AlF3 layers were deposited upon fused-silica substrates placed on a simulated fixture which has the same radius of curvature with the spherical element to characterize the optical and microstructural prop -erties of the AlF3 films.First, transmittance and reflectance spectra of AlF 3 layers at different positions on the fixture were measured by an UV-visible spectrophotometer from 185 nm to 800 nm, and their refractive indexes and extinction coefficients were obtained .Then the surface morphologies and surface roughnesses of AlF 3 lay-ers were assessed with an Atomic Force Microscopy (AFM).Finally, the X-ray Diffraction(XRD) was used to characterize the microstructure of AlF 3 layers.Experimental results indicate that for AlF 3 layers deposited at different diameters on the spherical element , their optical losses increase along with the diameters .The extinc-tion coefficients of AlF 3 layers at the edge position are 1.8 times of that at the center , and surface roughness are 17.7 times of that at the center .The results suggest that for the coating on the surface of spherical ele-ment, the difference in optical loss along the diameter caused by steam incident angles should be considered .关键词
热蒸发/AlF3薄膜/球面元件/微观结构特性Key words
thermal evaporation/AlF3 thin film/spherical element/microstructural property分类
数理科学引用本文复制引用
时光,梅林,张立超..球面元件表面 AlF3薄膜的光学特性和微观结构表征[J].中国光学,2013,(6):906-911,6.基金项目
国家重大科技专项（02专项）基金资助项目 （）
